Gimbaled 2D Scanning Mirror with Vertical Combs for Laser Display

Author

Ko, Young-Chul ; Lee, Jin-Ho ; Cho, Jin-Woo ; Park, Yong-Hwa ; Kim, Jun-O ; Cho, Yong-Chul ; Chang, Seok-Mo ; Jeong, Hyun-Gu ; Kang, Seok-Jin ; Chung, Seok-Whan ; Shin, Seong-Ho ; Sunu, John ; Yoo, Ji-Beom

Author_Institution

Micro Syst. Lab., Samsung Adv. Inst. of Technol., Suwon

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

104

Lastpage

105

Abstract

We designed a gimbaled 2D scanning mirror (GSM) which is driven electrostatically by vertical comb fingers. The horizontal scanning mirror with a diameter of 1 mm is rotating with respect to y-axis in the eye-shaped frame. For vertical scanning, the eye-shaped frame is rotating with respect to x-axis which is perpendicular to the horizontal scanning axis. This GSM can be actuated in two axes simultaneously resulting in the realization of 2D image in the screen with single beam raster scanning. We obtained a mechanical scanning angle of plusmn8deg(resonance) and plusmn4.2deg(non-resonance), with the resonant frequency range of 24~24.5 kHz and 800~900 Hz under the sinusoidal and triangular driving voltages for horizontal and vertical scanning, respectively

Keywords

laser mirrors; micromirrors; optical design techniques; optical projectors; optical scanners; 1 mm; 24 to 24.5 kHz; 2D image; 800 to 900 Hz; eye-shaped frame; gimbaled 2D scanning mirror; horizontal scanning mirror; laser display; mechanical scanning; single beam raster scanning; vertical combs; vertical scanning; Fingers; GSM; High speed optical techniques; Mirrors; Resonance; Resonant frequency; Springs; Stators; Two dimensional displays; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708286

Filename

1708286