• DocumentCode
    2663687
  • Title

    A Large Rotation Angle Electrothermal Micromirror with Integrated Platinum Heater

  • Author

    Wu, Lei ; Xie, Huikai

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    106
  • Lastpage
    107
  • Abstract
    We report a single-crystal-silicon electrothermal micromirror with an integrated platinum heater. A large rotation angle of 124deg has been achieved at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz
  • Keywords
    elemental semiconductors; micro-optomechanical devices; micromirrors; optical design techniques; platinum; silicon; 12.5 V; 336 Hz; integrated platinum heater; single-crystal-silicon electrothermal micromirror; Electrothermal effects; Etching; Fabrication; Heat engines; Micromirrors; Mirrors; Platinum; Resistance heating; Silicon; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708287
  • Filename
    1708287
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663687