• DocumentCode
    2663820
  • Title

    High-Reflectivity Two-Axis Vertical Comb Drive Microscanners for Confocal Imaging Applications

  • Author

    Kumar, Karthik ; Hoshino, Kazunori ; Shin, Hyun-Joon ; Richards-Kortum, Rebecca ; Zhang, Xiaojing

  • Author_Institution
    Dept. of Biomed. Eng., Texas Univ., Austin, TX
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    120
  • Lastpage
    121
  • Abstract
    We present 500times700 mum metal-coated scanning micromirrors fabricated from bonded SOI-Si wafers with ~90% reflectivity at 633 nm. Confocal images with 1 mum resolution were generated using single axis actuation of plusmn2.5deg at 1.87 KHz
  • Keywords
    biomedical optical imaging; cellular biophysics; elemental semiconductors; image scanners; micromirrors; optical fabrication; optical scanners; reflectivity; silicon; silicon-on-insulator; 1.87 KHz; 633 nm; Si; Si-SiO2; bonded SOI-Si wafers; metal-coated scanning micromirrors fabrication; reflectivity; subcellular scale confocal imaging; vertical combdrive microscanners; Etching; Image resolution; Mirrors; Optical films; Optical imaging; Optical surface waves; Protection; Reflectivity; Stators; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708294
  • Filename
    1708294
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663820