• DocumentCode
    2663829
  • Title

    Monolithic Bi-directional Linear Microactuator for Light Beam Manipulation

  • Author

    Cheng, Hao-Der ; Hsiao, Sheng-Yi ; Wu, Mingching ; Fang, Weileun

  • Author_Institution
    Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu
  • fYear
    2006
  • fDate
    21-24 Aug. 2006
  • Firstpage
    122
  • Lastpage
    123
  • Abstract
    This study monolithically fabricates a bi-directional linear microactuator on SOI wafer. The actuator is driven by both thermal and magnetic means. This actuator provides plusmn44 mum and plusmn53 mum displacements in the in-plane and out-of-plane directions, respectively
  • Keywords
    micro-optomechanical devices; microactuators; optical fabrication; silicon-on-insulator; SOI wafer; Si-SiO2; light beam manipulation; monolithic bi-directional linear microactuator; Bidirectional control; Coils; Displays; Focusing; Hydraulic actuators; Lenses; Microactuators; Microoptics; Optical arrays; Optical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
  • Conference_Location
    Big Sky, MT
  • Print_ISBN
    0-7803-9562-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2006.1708295
  • Filename
    1708295
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2663829