DocumentCode
2664062
Title
Spatial Light Modulators for Maskless Lithography
Author
Jung, Il Woong ; Wang, Jen-Shiang ; Solgaard, Olav
Author_Institution
Dept. of Electr. Eng., Stanford Univ., CA
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
150
Lastpage
151
Abstract
We present a piston-type SLM (spatial light modulator) as a programmable pattern generator for maskless lithography. Large arrays of up to ~40,000 mirrors with 20 mum pixels have been fabricated. The mirrors have high resonance frequencies (f=564 kHz), and achieve deflections of lambda/2 for actuation voltages <100 V. Using the SLM in a simple imaging system, we demonstrate the generation of aerial images of dark line patterns
Keywords
micromirrors; optical arrays; optical design techniques; optical fabrication; optical images; photolithography; pistons; spatial light modulators; 564 kHz; aerial image generation; maskless lithography; micromirrors; mirror arrays; optical fabrication; piston-type spatial light modulators; programmable pattern generator; resonance frequencies; Actuators; Electrodes; Lithography; Micromirrors; Mirrors; Optical device fabrication; Optical modulation; Pistons; Rough surfaces; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708309
Filename
1708309
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