DocumentCode
2664088
Title
MEMS Mirror Arrays for Adaptive Optics Applications
Author
Spahn, O.B. ; Cowan, W.D. ; Dagel, D.J. ; Resnick, P.J. ; Jokiel, B. ; Grossetette, G.D.
Author_Institution
Sandia Nat. Labs., Albuquerque, NM
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
154
Lastpage
155
Abstract
A high fill-factor 61-element array containing 0.5 mm hexagonal mirrors that tip, tilt and piston with a 27 mum stroke has been fabricated in SUMMiT Vtrade technology. Design, fabrication and performance will be discussed
Keywords
micromechanical devices; micromirrors; optical arrays; optical design techniques; optical fabrication; 0.5 mm; 61-element array; MEMS mirror arrays; SUMMiT Vtrade technology; adaptive optics; mirror fabrication; optical design; Actuators; Adaptive arrays; Adaptive optics; Laboratories; Metallization; Micromechanical devices; Mirrors; Optical arrays; Pistons; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708311
Filename
1708311
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