Title :
MEMS Based Dual-axes Confocal Reflectance Handheld Microscope for in vivo Imaging
Author :
Piyawattanametha, W. ; Liu, J. T C ; Mandella, M.J. ; Ra, H. ; Wong, L.K. ; Hsiung, P. ; Wang, T.D. ; Kino, G.S. ; Solgaard, O.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA
Abstract :
We demonstrate a dual-axes confocal reflectance microscope in a 10-mm diameter handheld package. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned vertical comb actuators. The maximum DC optical scan angles are plusmn3.3deg on the inner axis and plusmn1.0deg on the outer axis, and the corresponding resonance frequencies are 3.54 kHz and 1.1 kHz. The imaging rate is 30 frames/second, and the microscope achieves full-width-half-maximum (FWHM) transverse and axial resolutions of 8 mum and 10 mum, respectively
Keywords :
bioMEMS; biomedical optical imaging; image scanners; micro-optomechanical devices; optical microscopy; 1.1 kHz; 3.54 kHz; FWHM; barbell-shaped scanner; dual-axes confocal reflectance handheld microscope; full-width-half-maximum; in vivo imaging; optical scan angles; resonance frequency; self-aligned vertical comb actuators; two-dimensional MEMS scanner; Actuators; Image resolution; In vivo; Micromechanical devices; Microscopy; Optical imaging; Packaging; Reflectivity; Resonance; Resonant frequency;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708316
