Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner

Author

Ra, H. ; Piyawattanametha, W. ; Taguchi, Y. ; Solgaard, O.

Author_Institution

Dept. of Electr. Eng., Stanford Univ., CA

fYear

2006

fDate

21-24 Aug. 2006

Firstpage

166

Lastpage

167

Abstract

This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to increase efficiency. Fluorescence imaging is successfully demonstrated by a table-top microscope system. Images with a field of view (FOV) of 211 mumtimes210 mum are acquired at 8 frames per second. The transverse resolution is 5.63 mum and 6.92 mum for the vertical and horizontal dimensions, respectively

Keywords

bioMEMS; biomedical optical imaging; electrostatic actuators; fluorescence; image scanners; micro-optomechanical devices; optical microscopy; silicon-on-insulator; SOI; blanket evaporation; double silicon-on-insulator wafer; dual-axes confocal fluorescence microscopy; electrostatic comb actuators; fluorescence imaging; gimbaled scanner; table-top microscope system; two-dimensional MEMS scanner; two-dimensional microelectromechanical systems; Fluorescence; High-resolution imaging; In vivo; Micromechanical devices; Mirrors; Optical imaging; Optical surface waves; Rail to rail outputs; Reflectivity; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on

Conference_Location

Big Sky, MT

Print_ISBN

0-7803-9562-X

Type

conf

DOI

10.1109/OMEMS.2006.1708317

Filename

1708317