DocumentCode
2664292
Title
Thermo-Pneumatically Actuated, Membrane-based Micro-Mirrors
Author
Werber, Armin ; Zappe, Hans
Author_Institution
Dept. of Microsyst. Eng., Freiburg Univ.
fYear
2006
fDate
21-24 Aug. 2006
Firstpage
179
Lastpage
180
Abstract
Thermo-pneumatically actuated, membrane-based micro-mirrors providing a large range in tilting motion, with angles up to 13deg, and piston motion with strokes up to 80 mum are presented. Single mirrors as well as mirror arrays are realizable
Keywords
micro-optomechanical devices; micromirrors; optical arrays; pneumatic actuators; thermo-optical devices; membrane-based micromirrors; mirror arrays; piston motion; thermo-pneumatic actuator; tilting motion; Biomembranes; Etching; Fabrication; Glass; Mirrors; Optical imaging; Optical interconnections; Pistons; Shape; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location
Big Sky, MT
Print_ISBN
0-7803-9562-X
Type
conf
DOI
10.1109/OMEMS.2006.1708324
Filename
1708324
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