Title :
Thermo-Pneumatically Actuated, Membrane-based Micro-Mirrors
Author :
Werber, Armin ; Zappe, Hans
Author_Institution :
Dept. of Microsyst. Eng., Freiburg Univ.
Abstract :
Thermo-pneumatically actuated, membrane-based micro-mirrors providing a large range in tilting motion, with angles up to 13deg, and piston motion with strokes up to 80 mum are presented. Single mirrors as well as mirror arrays are realizable
Keywords :
micro-optomechanical devices; micromirrors; optical arrays; pneumatic actuators; thermo-optical devices; membrane-based micromirrors; mirror arrays; piston motion; thermo-pneumatic actuator; tilting motion; Biomembranes; Etching; Fabrication; Glass; Mirrors; Optical imaging; Optical interconnections; Pistons; Shape; Silicon;
Conference_Titel :
Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Conference_Location :
Big Sky, MT
Print_ISBN :
0-7803-9562-X
DOI :
10.1109/OMEMS.2006.1708324
