Surface acoustic wave flow sensor

Author

Wang, Yizhong ; Li, Zheng ; Qin, Lifeng ; Chyu, Minking K. ; Wang, Qing-Ming

Author_Institution

Dept. of Mech. Eng. & Mater. Sci., Univ. of Pittsburgh, Pittsburgh, PA, USA

fYear

2011

fDate

2-5 May 2011

Firstpage

1

Lastpage

4

Abstract

A novel surface acoustic wave flow sensor is studied in this paper. ST-X cut quartz SAW delay line device is chosen for its ultra-high temperature stability. Test chamber is designed and built using acrylic plate and the SAW device is mounted on the chamber wall. Test Results show that SAW flow sensor has a linear relationship between the passing flow rate and system phase delay. The system has a response resolution of 4.24 Deg / kPa in terms of pressure or 1 degree phase change for flow rate change of every 11.8 ml/min. The change of resonant frequency is found to be not as obvious as phase change. The system can be further integrated with wireless system for remote on site monitoring.

Keywords

delay lines; flow sensors; surface acoustic wave sensors; ST-X cut quartz SAW delay line device; acrylic plate; resonant frequency; surface acoustic wave flow sensor; test chamber; ultra high temperature stability; Delay; Fluid flow measurement; Resonant frequency; Substrates; Surface acoustic waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Conference_Location

San Fransisco, CA

ISSN

1075-6787

Print_ISBN

978-1-61284-111-3

Type

conf

DOI

10.1109/FCS.2011.5977735

Filename

5977735