Title :
Surface acoustic wave flow sensor
Author :
Wang, Yizhong ; Li, Zheng ; Qin, Lifeng ; Chyu, Minking K. ; Wang, Qing-Ming
Author_Institution :
Dept. of Mech. Eng. & Mater. Sci., Univ. of Pittsburgh, Pittsburgh, PA, USA
Abstract :
A novel surface acoustic wave flow sensor is studied in this paper. ST-X cut quartz SAW delay line device is chosen for its ultra-high temperature stability. Test chamber is designed and built using acrylic plate and the SAW device is mounted on the chamber wall. Test Results show that SAW flow sensor has a linear relationship between the passing flow rate and system phase delay. The system has a response resolution of 4.24 Deg / kPa in terms of pressure or 1 degree phase change for flow rate change of every 11.8 ml/min. The change of resonant frequency is found to be not as obvious as phase change. The system can be further integrated with wireless system for remote on site monitoring.
Keywords :
delay lines; flow sensors; surface acoustic wave sensors; ST-X cut quartz SAW delay line device; acrylic plate; resonant frequency; surface acoustic wave flow sensor; test chamber; ultra high temperature stability; Delay; Fluid flow measurement; Resonant frequency; Substrates; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977735
