Title :
Determination of the mode shapes of energy trapping resonators using X-ray topography
Author :
Capelle, B. ; Détaint, J. ; Epelboin, Y.
Author_Institution :
IMPMC, Univ. Pierre et Marie Curie-P6 et Paris Diderot-P7, Paris, France
Abstract :
This paper considers the determination of the mode shapes using x-ray topography and the application of this method to resonant piezoelectric devices made of various materials (Quartz, LGS, Lithium tantalate). The basis of the method is recalled briefly and its application to thickness mode resonators or filters is particularly considered. A comparison of the observed mode shapes with those computed using the “essentially thickness mode” theory of H. F. Tiersten indicates that this theory give very good results concerning the modes shapes and the properties of the thickness mode devices even when materials presenting large coupling coefficients are used.
Keywords :
X-ray topography; crystal resonators; gallium compounds; lanthanum compounds; lithium compounds; quartz; LGS; La3Ga5SiO14; LiTaO3; SiO2; X-ray topography; energy trapping resonator; filters; lithium tantalate; mode shape determination; quartz; resonant piezoelectric device; thickness mode resonator; Anisotropic magnetoresistance; Couplings; Diffraction; Electrodes; Materials; Shape; Surfaces;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977747