• DocumentCode
    2665155
  • Title

    Higher density using diffusion patterned vias and fine line printing

  • Author

    Bender, David K. ; Ferreira, Amy M.

  • Author_Institution
    C-MAC of America, West Palm Beach, FL, USA
  • fYear
    1993
  • fDate
    4-6 Oct 1993
  • Firstpage
    471
  • Lastpage
    476
  • Abstract
    Design guidelines, process steps and test results from fabrication of two 40-mm multichip module (MCM)-Cs using the latest thick materials and printing techniques are discussed. Two two LIC (line interface controller) modules are designed with two large ASICs (plus memory) and prototyped using thick film gold conductors with 3 mil line/space and 6 mil via criteria. The second prototype of the LIC module utilizes silver conductors at 5 mil line and gap to further reduce cost. The second module design uses more bare die (field programmable gate arrays and memory) for a much higher interconnect density but still uses existing design guidelines. It is believed that 4 mil vias can be achieved in production and will be developed for future designs require higher density. Diffusion patterning allows a 50% reduction (4-6 mil) in via size versus traditional printed vias (10-20 mil)
  • Keywords
    application specific integrated circuits; hybrid integrated circuits; integrated circuit interconnections; integrated circuit packaging; integrated circuit reliability; multichip modules; 4 to 6 mm; 40 mm; Ag conductors; Al2O3 ceramic substrate; MCM-C; acid-base reaction; design guidelines; diffusion patterned vias; fabrication; field programmable gate arrays; fine line printing; higher interconnect density; large ASICs; line interface controller modules; memory; more bare die; multichip module; process steps; reliability testing; screen printing; thick film Au conductors; Conducting materials; Fabrication; Guidelines; Materials testing; Multichip modules; Printing; Process design; Prototypes; Thick films; Thickness control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International
  • Conference_Location
    Santa Clara, CA
  • Print_ISBN
    0-7803-1424-7
  • Type

    conf

  • DOI
    10.1109/IEMT.1993.398162
  • Filename
    398162