Title :
A demonstration system based on a fuzzy logic controller
Author :
Godfrey, Nowell ; Li, Hua ; Marcy, William
Author_Institution :
Comput. Sci. Dept., Texas Tech Univ., Lubbock, TX, USA
Abstract :
In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness
Keywords :
control system synthesis; electronics industry; fuzzy control; intelligent control; nonlinear control systems; optimal control; process control; real-time systems; robust control; three-term control; PID control; beam balancing system; control program; demonstration system; fuzzy control algorithm; fuzzy logic controller; intelligent control; intelligent manufacturing; nonlinear system; prototyping system; real-time control; robustness; semiconductor manufacturing; Automatic control; Control systems; Fuzzy control; Fuzzy logic; Manufacturing industries; Nonlinear control systems; Nonlinear dynamical systems; Optimal control; Prototypes; Real time systems;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-1424-7
DOI :
10.1109/IEMT.1993.398166
