Experimental study of quartz crystal gravity sensor by MEMS technology

Quartz sensor is promising as a gravity sensor. This paper describes an improved technique of gravity sensor, based on the VCXO and crystal properties from the principle of the quartz motion sensor. The size of prototype sensor is around 27.0×12.0×1.0 mm. The sensor is used in the experiment, which give the gravity change. The experimental results show the relationship between gravity change and load resonant frequency. Then, from these results, we show that the load resonant frequency changes in direct proportion to gravity change.