Motional impedance of resonators in the nonlinear regime

Author

Lee, Hyung Kyu ; Melamud, Renata ; Chandorkar, Saurabh ; Qu, Yu Qiao ; Salvia, James ; Kenny, Thomas W.

Author_Institution

Depts. of Mech. & Electr. Eng., Stanford Univ., Stanford, CA, USA

fYear

2011

fDate

2-5 May 2011

Firstpage

1

Lastpage

6

Abstract

We developed a model for the motional impedance Z_m of electrostatic resonators that operate in a nonlinear regime. The model predicts that the Z_m at resonance has the same expression as it has in the linear case. In addition, we developed a new measurement setup, which is based on a variable-phase feedback circuit. This setup enables the measurement of Z_m at operating points that are unobservable with a conventional impedance analyzer measurement. The estimation based on our model matches the measurement with errors less than 10% in the worst case.

Keywords

electric impedance measurement; micromechanical resonators; conventional impedance analyzer measurement; electrostatic micromechanical resonators; motional impedance; nonlinear regime; variable-phase feedback circuit; Current measurement; Estimation; Feedback circuits; Frequency measurement; Impedance; Impedance measurement; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Conference_Location

San Fransisco, CA

ISSN

1075-6787

Print_ISBN

978-1-61284-111-3

Type

conf

DOI

10.1109/FCS.2011.5977779

Filename

5977779