DocumentCode
2665505
Title
Software engineering for semiconductor manufacturing equipment suppliers
Author
Baudoin, Claude R. ; Kantor, Jeffrey P.
fYear
1993
fDate
4-6 Oct 1993
Firstpage
337
Lastpage
352
Abstract
The situation that exists in the equipment industry with respect to software development is examined. Some of the causes for this situation are explored. The elements of a complete approach to this problem (with applicability to software suppliers and system integrators as well as to equipment makers) are presented, and the interdependency between these various elements is indicated. Practical steps that can be taken by suppliers to redress the current lag in software engineering capability are discussed
Keywords
Aerospace industry; Computer industry; Control systems; Costs; Lithography; Process control; Production facilities; Semiconductor device manufacture; Software engineering; Software performance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium, 1993, Fifteenth IEEE/CHMT International
Conference_Location
Santa Clara, CA
Print_ISBN
0-7803-1424-7
Type
conf
DOI
10.1109/IEMT.1993.398183
Filename
398183
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