A new acoustic resonator concept based on acoustic waveguides using silicon/periodically poled transducer/silicon structures for RF applications

Author

Bassignot, Florent ; Ulliac, Gwenn ; Lesage, Jean-Marc ; Garcia, Julien ; Courjon, Emilie ; François, Bruno ; Ballandras, Sylvain

Author_Institution

Inst. FEMTO-ST, Besançon, France

fYear

2011

fDate

2-5 May 2011

Firstpage

1

Lastpage

6

Abstract

We propose a new acoustic resonator concept based on a periodically poled transducer (PPT) in a piezoelectric substrate (LiNbO₃ or LiTaO₃), embedded between two guiding substrates in order to create an acoustic waveguide. A resonator operating at 131MHz have been successfully fabricated and used in order to stabilize an oscillator. However the fabricated resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si in order to reduce the thermal sensitivity.

Keywords

acoustic transducers; acoustic waveguides; elemental semiconductors; silicon; surface acoustic wave resonators; PPT; RF application; Si; acoustic resonator; acoustic waveguides; frequency 131 MHz; oscillator; periodical poled transducer; piezoelectric substrate; thermal sensitivity; Acoustic waves; Lithium niobate; Phase noise; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International

Conference_Location

San Fransisco, CA

ISSN

1075-6787

Print_ISBN

978-1-61284-111-3

Type

conf

DOI

10.1109/FCS.2011.5977823

Filename

5977823