Research of electronic device manufacture module control

A problem of increasing efficiency of manufacture module control systems is investigated. Possibilities of rational selection of number of hierarchical levels are considered. It is shown that with the variation of efficiencies of these systems and their interfaces, which form these levels, the rational number of hierarchical levels also changes. That proves the need to apply integral value of efficiency index when selecting number of hierarchical levels during entire period of system exploitation. Integral microchip manufacture complex structure is used in order to illustrate the method. It is emphasized, that method can be applied also when components of manufacture module form a set or a system