Title :
Ferroelectric PZT RF MEMS resonators
Author :
Pulskamp, Jeffrey S. ; Bedair, Sarah S. ; Polcawich, Ronald G. ; Judy, D. ; Bhave, Sunil A.
Author_Institution :
US Army Res. Lab., Adelphi, MD, USA
Abstract :
This paper presents recent work on ferroelectric-piezoelectric lead zirconate titanate (PZT) RF MEMS resonators. Several research topics are introduced including design modifications that improve out-of-band rejection by 35dB, a demonstration of a high rejection (~117dB) parallel resonant mode with DC bias tunable rejection, a MEMS support design for the mitigation of anchor loss, and a numerical electrode shaping design technique that permits the excitation of arbitrary modes in arbitrary geometries.
Keywords :
crystal resonators; ferroelectric devices; lead compounds; micromechanical resonators; DC bias tunable rejection; PZT; ferroelectric PZT RF MEMS resonators; ferroelectric-piezoelectric lead zirconate titanate RF MEMS resonators; numerical electrode shaping design technique; out-of-band rejection; Electrodes; Impedance; Micromechanical devices; Modal analysis; Radio frequency; Resonant frequency; Stress;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977870
