Title :
Reliability of next generation high performance pMEMS™ resonator oscillators
Author :
Bhugra, Harmeet ; Lee, Seungbae ; Pan, Wanling ; Wang, Ye ; Lei, Dino
Author_Institution :
Integrated Device Technol. Inc. (IDTI), San Jose, CA, USA
Abstract :
Long term reliability of piezoelectric micro-electro mechanical systems (pMEMS™) resonators and oscillators has been characterized for high performance frequency reference applications. In particular, high-Q piezoelectric bulk acoustic wave (BAW) resonators exhibit aging (frequency drift) within measurement system accuracy (±2ppm) under two long-term measurement conditions: over 9 months at 25°C, and over 1400 hours at 125°C.
Keywords :
ageing; bulk acoustic wave devices; crystal resonators; measurement systems; micromechanical resonators; oscillators; high performance frequency reference application; high-Q piezoelectric bulk acoustic wave resonator; long term measurement condition; long term reliability; measurement system accuracy; next generation high performance reliability; pMEMS resonator oscillator; piezoelectric microelectromechanical system resonator; temperature 125 degC; temperature 25 degC; Aging; Frequency measurement; Oscillators; Resonant frequency; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
Conference_Location :
San Fransisco, CA
Print_ISBN :
978-1-61284-111-3
DOI :
10.1109/FCS.2011.5977878
