• DocumentCode
    2667257
  • Title

    Reliability of next generation high performance pMEMS™ resonator oscillators

  • Author

    Bhugra, Harmeet ; Lee, Seungbae ; Pan, Wanling ; Wang, Ye ; Lei, Dino

  • Author_Institution
    Integrated Device Technol. Inc. (IDTI), San Jose, CA, USA
  • fYear
    2011
  • fDate
    2-5 May 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Long term reliability of piezoelectric micro-electro mechanical systems (pMEMS™) resonators and oscillators has been characterized for high performance frequency reference applications. In particular, high-Q piezoelectric bulk acoustic wave (BAW) resonators exhibit aging (frequency drift) within measurement system accuracy (±2ppm) under two long-term measurement conditions: over 9 months at 25°C, and over 1400 hours at 125°C.
  • Keywords
    ageing; bulk acoustic wave devices; crystal resonators; measurement systems; micromechanical resonators; oscillators; high performance frequency reference application; high-Q piezoelectric bulk acoustic wave resonator; long term measurement condition; long term reliability; measurement system accuracy; next generation high performance reliability; pMEMS resonator oscillator; piezoelectric microelectromechanical system resonator; temperature 125 degC; temperature 25 degC; Aging; Frequency measurement; Oscillators; Resonant frequency; Silicon; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control and the European Frequency and Time Forum (FCS), 2011 Joint Conference of the IEEE International
  • Conference_Location
    San Fransisco, CA
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-61284-111-3
  • Type

    conf

  • DOI
    10.1109/FCS.2011.5977878
  • Filename
    5977878
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2667257