Design and performance of CMOS micromechanical resonator oscillators

Author

Nguyen, Clark T C ; Howe, Roger T.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1994

fDate

1-3 Jun 1994

Firstpage

127

Lastpage

134

Abstract

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve high stability. It is shown that the closed-loop, steady-state oscillation amplitude of this oscillator can be controlled through the dc-bias voltage applied to the capacitively driven and sensed μresonator. Brownian motion and mass loading phenomena are shown to have a greater influence on short-term stability in this micro-scale

Keywords

Brownian motion; CMOS integrated circuits; equivalent circuits; frequency stability; integrated circuit technology; micromachining; micromechanical resonators; random noise; Brownian motion; CMOS micromechanical resonator oscillators; capacitively driven microresonator; closed-loop steady-state oscillation amplitude; combined CMOS; dc-bias voltage; mass loading; monolithic high-Q oscillator; oscillation frequency; polysilicon micromechanical resonator; stability; surface micromachining; CMOS technology; Capacitance; Electrodes; Frequency; Micromachining; Micromechanical devices; Oscillators; Silicon; Stability; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International

Conference_Location

Boston, MA

Print_ISBN

0-7803-1945-1

Type

conf

DOI

10.1109/FREQ.1994.398345

Filename

398345