Title :
Design and performance of CMOS micromechanical resonator oscillators
Author :
Nguyen, Clark T C ; Howe, Roger T.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve high stability. It is shown that the closed-loop, steady-state oscillation amplitude of this oscillator can be controlled through the dc-bias voltage applied to the capacitively driven and sensed μresonator. Brownian motion and mass loading phenomena are shown to have a greater influence on short-term stability in this micro-scale
Keywords :
Brownian motion; CMOS integrated circuits; equivalent circuits; frequency stability; integrated circuit technology; micromachining; micromechanical resonators; random noise; Brownian motion; CMOS micromechanical resonator oscillators; capacitively driven microresonator; closed-loop steady-state oscillation amplitude; combined CMOS; dc-bias voltage; mass loading; monolithic high-Q oscillator; oscillation frequency; polysilicon micromechanical resonator; stability; surface micromachining; CMOS technology; Capacitance; Electrodes; Frequency; Micromachining; Micromechanical devices; Oscillators; Silicon; Stability; Voltage;
Conference_Titel :
Frequency Control Symposium, 1994. 48th., Proceedings of the 1994 IEEE International
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1945-1
DOI :
10.1109/FREQ.1994.398345
