Title :
Excimer Laser Ablation Processing Of Materials In Gas And Plasma Environments
Author :
Ching, C.H. ; Ventzek, P.L.G. ; Gilgenbach, Ronald M. ; Lindley, R.A.
Author_Institution :
University of Michigan
Keywords :
Atomic beams; Atomic measurements; Gas lasers; Laser ablation; Laser theory; Optical materials; Plasma materials processing; Plasma measurements; Plasma temperature; Radio frequency;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697979
