DocumentCode

2668454

Title

Optical Diagnostics Of Copper Vapor Laser Machining Of Polymers

Author

Ventzek, P.L.G. ; Gilgenbach, Ronald M. ; Ching, C.H. ; Lindley, R.A. ; McColl, W.B.

Author_Institution

The University of Michigan

fYear

1993

fDate

1-3 June 1993

Firstpage

168

Lastpage

168

Keywords

Acoustic beams; Copper; Electrodes; Etching; Machining; Optical polymers; Plasma materials processing; Plasma properties; Plasma sheaths; Superconducting magnets;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on

Conference_Location

Tampa, FL, USA

Print_ISBN

0-7803-0716-X

Type

conf

DOI

10.1109/PLASMA.1992.697980

Filename

697980