• DocumentCode
    2668656
  • Title

    The Electrode Sheath Width In RF Discharges: A Coinparison Of Analytic Models And Experimental Measurements

  • Author

    Piejak, R.B. ; Godyak, V.A. ; Alexandrovich, B.M.

  • Author_Institution
    GTE Laboratories Inc.
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    168
  • Lastpage
    168
  • Keywords
    Electrodes; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma sheaths; Predictive models; Radio frequency; Superconducting magnets; Surface discharges;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697981
  • Filename
    697981
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2668656