DocumentCode :
2668751
Title :
Control for high-speed archimedean spiral nanopositioning
Author :
Kotsopoulos, Andreas ; Pantazi, Angeliki ; Antonakopoulos, Theodore
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Patras, Rio, Greece
fYear :
2010
fDate :
12-15 Dec. 2010
Firstpage :
998
Lastpage :
1001
Abstract :
Scanning probes are being considered as the basis for a variety of emerging nanoscale applications including sample imaging and ultra-high-density probe storage. In this work, a controller for track-follow in Archimedean spiral nanopositioning is presented. The proposed tracking controller is based on a Linear Quadratic Gaussian (LQG) component and a tracking controller, extended with frequency-sliding peak filters in order to exploit the inherent properties of the spiral reference signal. Simulations show that the proposed architecture enables spiral scan operation with very low tracking error even at very high scan frequencies.
Keywords :
laboratory techniques; linear quadratic Gaussian control; nanopositioning; Archimedean spiral nanopositioning control; frequency-sliding peak filters; linear quadratic Gaussian control; scanning probes; spiral reference signal; track-follow controller; ultra-high-density probe storage; Indexes; Micromechanical devices; MEMS; control; nanopositioning; peak; probe; spiral;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics, Circuits, and Systems (ICECS), 2010 17th IEEE International Conference on
Conference_Location :
Athens
Print_ISBN :
978-1-4244-8155-2
Type :
conf
DOI :
10.1109/ICECS.2010.5724682
Filename :
5724682
Link To Document :
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