DocumentCode
2668751
Title
Control for high-speed archimedean spiral nanopositioning
Author
Kotsopoulos, Andreas ; Pantazi, Angeliki ; Antonakopoulos, Theodore
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Patras, Rio, Greece
fYear
2010
fDate
12-15 Dec. 2010
Firstpage
998
Lastpage
1001
Abstract
Scanning probes are being considered as the basis for a variety of emerging nanoscale applications including sample imaging and ultra-high-density probe storage. In this work, a controller for track-follow in Archimedean spiral nanopositioning is presented. The proposed tracking controller is based on a Linear Quadratic Gaussian (LQG) component and a tracking controller, extended with frequency-sliding peak filters in order to exploit the inherent properties of the spiral reference signal. Simulations show that the proposed architecture enables spiral scan operation with very low tracking error even at very high scan frequencies.
Keywords
laboratory techniques; linear quadratic Gaussian control; nanopositioning; Archimedean spiral nanopositioning control; frequency-sliding peak filters; linear quadratic Gaussian control; scanning probes; spiral reference signal; track-follow controller; ultra-high-density probe storage; Indexes; Micromechanical devices; MEMS; control; nanopositioning; peak; probe; spiral;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics, Circuits, and Systems (ICECS), 2010 17th IEEE International Conference on
Conference_Location
Athens
Print_ISBN
978-1-4244-8155-2
Type
conf
DOI
10.1109/ICECS.2010.5724682
Filename
5724682
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