• DocumentCode
    2668751
  • Title

    Control for high-speed archimedean spiral nanopositioning

  • Author

    Kotsopoulos, Andreas ; Pantazi, Angeliki ; Antonakopoulos, Theodore

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Patras, Rio, Greece
  • fYear
    2010
  • fDate
    12-15 Dec. 2010
  • Firstpage
    998
  • Lastpage
    1001
  • Abstract
    Scanning probes are being considered as the basis for a variety of emerging nanoscale applications including sample imaging and ultra-high-density probe storage. In this work, a controller for track-follow in Archimedean spiral nanopositioning is presented. The proposed tracking controller is based on a Linear Quadratic Gaussian (LQG) component and a tracking controller, extended with frequency-sliding peak filters in order to exploit the inherent properties of the spiral reference signal. Simulations show that the proposed architecture enables spiral scan operation with very low tracking error even at very high scan frequencies.
  • Keywords
    laboratory techniques; linear quadratic Gaussian control; nanopositioning; Archimedean spiral nanopositioning control; frequency-sliding peak filters; linear quadratic Gaussian control; scanning probes; spiral reference signal; track-follow controller; ultra-high-density probe storage; Indexes; Micromechanical devices; MEMS; control; nanopositioning; peak; probe; spiral;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics, Circuits, and Systems (ICECS), 2010 17th IEEE International Conference on
  • Conference_Location
    Athens
  • Print_ISBN
    978-1-4244-8155-2
  • Type

    conf

  • DOI
    10.1109/ICECS.2010.5724682
  • Filename
    5724682