Title :
X-ray imaging for electron cyclotron resonance processing plasmas
Author :
Chew, K.H. ; Shohet, J.L. ; Castagna, T.J.
Author_Institution :
University of Wisconsin
Keywords :
Cyclotrons; Electrons; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma measurements; Plasma properties; Plasma x-ray sources; Resonance; X-ray imaging;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.697983
