• DocumentCode
    2669239
  • Title

    On the silicon nitride film formation from N/sub 2/-SiH/sub 4/ electron cyclotron resonance plasma

  • Author

    Sun-Kyu Song ; Hong-Young Chang

  • Author_Institution
    KAIST
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    169
  • Lastpage
    169
  • Keywords
    Cyclotrons; Electrons; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties; Plasma x-ray sources; Resonance; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697984
  • Filename
    697984
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2669239