DocumentCode
2669579
Title
Stabilization and performance enhancement of a large volume, unmagnetized microwave plasma facility (MPF)
Author
Konath, S.G. ; Roth
Author_Institution
University of Tennessee
fYear
1993
fDate
1-3 June 1993
Firstpage
170
Lastpage
170
Abstract
Summary form only given, as follows. The UTK microwave plasma facility (MPF) (Ref. 1) contains a plasma generated in a vacuum tank 50 cm in diameter and 1 meter long by approximately two kilowatts of 2.45 GHz microwave power. The plasma consists of a uniform volume of about 120 liters over which the electron numbber density can reach 5 x 10/sup 16//meter/sup 3/, with spatial variations no more than about 5%. The microwave hardware and major features of this facility are shown in Figure 1.
Keywords
Atmospheric-pressure plasmas; Electrons; Glow discharges; Microwave circuits; Microwave generation; Plasma applications; Plasma density; Plasma materials processing; Power generation; Steady-state;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location
Tampa, FL, USA
Print_ISBN
0-7803-0716-X
Type
conf
DOI
10.1109/PLASMA.1992.697986
Filename
697986
Link To Document