Title :
Reliability review of 250 GHz fully self aligned heterojunction bipolar transistors for millimeterwave applications
Author :
Diop, Malick ; Marin, Mathieu ; Revil, Nathalie ; Pourchon, Franck ; Leyris, Cedric ; Chevalier, Pascal ; Ghibaudo, Gérard
Author_Institution :
Technol. R&D, STMicroelectron., Crolles, France
Abstract :
Reliability performances of fully self aligned heterojunction bipolar transistors were investigated under high current and voltage stress conditions. We point out in this paper that generation-recombination traps induced by reverse bias stress can be repaired by forward bias. This is possible thanks to high enough device temperature (strong self-heating condition). Low frequency noise measurements and HICUM modelling of power dissipation refine this analysis. Finally, degradation of base-collector junction was investigated under mixed-mode stress and reveals a predominance of defects induced in the space charge area by impact ionization.
Keywords :
field effect MIMIC; heterojunction bipolar transistors; semiconductor device measurement; semiconductor device models; semiconductor device reliability; CMOS technology; HICUM modelling; base-collector junction; frequency 250 GHz; generation-recombination trap; low frequency noise measurement; millimeterwave application; reliability review; reverse bias stress; self aligned heterojunction bipolar transistor; self-heating condition; Degradation; Frequency measurement; Heterojunction bipolar transistors; Low-frequency noise; Noise measurement; Power dissipation; Power measurement; Stress; Temperature; Voltage; BiCMOS; Bipolar transistor; SiGe:C; component; high speed; noise; reliability; self heating;
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2009.5173227