DocumentCode :
2669802
Title :
3D and 2D silicon photonic crystals for microphotonic circuits
Author :
Vlasov, Y.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear :
2003
fDate :
6-6 June 2003
Abstract :
Summary form only given. Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.
Keywords :
integrated optics; photonic crystals; self-assembly; silicon; surface treatment; Si; etching; microelectronics processing; microphotonic circuits; self-assembly approach; silicon photonic crystals; ultradense photonic integrated circuits; Integrated optics; Optical device fabrication; Optical devices; Optical losses; Optical waveguides; Photonic crystals; Photonic integrated circuits; Self-assembly; Silicon; Slabs;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Quantum Electronics and Laser Science, 2003. QELS. Postconference Digest
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-749-0
Type :
conf
DOI :
10.1109/QELS.2003.238448
Filename :
1276268
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2669802
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