DocumentCode
2669802
Title
3D and 2D silicon photonic crystals for microphotonic circuits
Author
Vlasov, Y.
Author_Institution
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fYear
2003
fDate
6-6 June 2003
Abstract
Summary form only given. Photonic crystals might offer a unique solution for building ultradense photonic integrated circuits. Recent achievements in fabrication of silicon photonic crystals compatible with microelectronics processing will be reported.
Keywords
integrated optics; photonic crystals; self-assembly; silicon; surface treatment; Si; etching; microelectronics processing; microphotonic circuits; self-assembly approach; silicon photonic crystals; ultradense photonic integrated circuits; Integrated optics; Optical device fabrication; Optical devices; Optical losses; Optical waveguides; Photonic crystals; Photonic integrated circuits; Self-assembly; Silicon; Slabs;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics and Laser Science, 2003. QELS. Postconference Digest
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-749-0
Type
conf
DOI
10.1109/QELS.2003.238448
Filename
1276268
Link To Document