• DocumentCode
    2670259
  • Title

    Remote ECR Plasma Deposition Of Diamond Thin Films From Water-Methanol mixtures

  • Author

    Buckle, K.A. ; Koba, R. ; Rodgers, Jeremy

  • Author_Institution
    University of South Florida
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    172
  • Lastpage
    172
  • Keywords
    Computer simulation; Electrons; Kinetic energy; Liquids; Neutrons; Plasma materials processing; Plasma properties; Plasma simulation; Plasma temperature; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.697990
  • Filename
    697990
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2670259