• DocumentCode
    2670441
  • Title

    Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering

  • Author

    Wu, Shih-Jeh ; Shen, Ting-Wai

  • Author_Institution
    Dept. of Mech. Eng., I-Shou Univ., Kaohsiung
  • fYear
    0
  • fDate
    0-0 0
  • Firstpage
    444
  • Lastpage
    449
  • Abstract
    Aluminum nitride (AIN) piezoelectric thin film is very popular in RF resonators and bio-sensors. In this paper the AIN thin film is studied by RF sputtering system. The crystal growth of c axis (002) is important for good electric properties and the effect of different parameters are studied in this paper including N2/Ar ratio, sputtering pressure
  • Keywords
    aluminium compounds; biosensors; crystal growth; nitrogen compounds; piezoelectric materials; piezoelectric thin films; resonators; sputtering; N2-Ar; RF magnetron sputtering; RF resonators; bio-sensors; crystal growth; piezoelectric aluminum nitride thin film; Aluminum nitride; Atomic force microscopy; Crystallization; Electrodes; Piezoelectric films; Radio frequency; Rough surfaces; Scanning electron microscopy; Sputtering; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Robotics and Biomimetics (ROBIO). 2005 IEEE International Conference on
  • Conference_Location
    Shatin
  • Print_ISBN
    0-7803-9315-5
  • Type

    conf

  • DOI
    10.1109/ROBIO.2005.246308
  • Filename
    1708784
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2670441