Reliability of single and dual Layer Pt nanocrystal devices for NAND flash applications: A 2-region model for endurance defect generation

Author

Singh, Pawan K. ; Bisht, Gaurav ; Sivatheja, M. ; Sandhya, C. ; Mukhopadhyay, Gautam ; Mahapatra, Souvik ; Hofmann, Ralf ; Singh, Karam ; Krishna, Nety

Author_Institution

Indian Inst. of Technol. Bombay, Mumbai, India

fYear

2009

fDate

26-30 April 2009

Firstpage

301

Lastpage

306

Abstract

Nanocrystal (NC) based memory devices are considered a possible alternative for floating gate (FG) replacement below 30 nm node. In this work, endurance reliability of Pt NC devices is investigated for single layer (SL) and dual layer (DL) structures. The degradation in the devices due to Program/Erase (P/E) stress is investigated. Relative improvement in reliability of DL structure over SL structure is shown. A physical model for defect generation in the gate stack is proposed which is able to explain endurance and post-cycling characteristics. Dual layer structure is shown to have better inherent reliability over single layer structure.

Keywords

NAND circuits; flash memories; integrated circuit reliability; logic gates; nanostructured materials; platinum; NAND flash applications; NC device endurance defect generation; NC device endurance reliability; Pt; defect generation physical model; dual layer structure analysis; floating gate replacement; gate stack defect generation; nanocrystal based memory device; postcycling characteristics; program-erase stress; single layer structure study; size 30 nm; Aluminum oxide; Character generation; Dielectric devices; Dielectric materials; Dielectric thin films; Fabrication; Nanocrystals; Nonvolatile memory; Size control; Thickness control; Flash memory; MLC; Metal nanocrystal; component; reliability;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 2009 IEEE International

Conference_Location

Montreal, QC

ISSN

1541-7026

Print_ISBN

978-1-4244-2888-5

Electronic_ISBN

1541-7026

Type

conf

DOI

10.1109/IRPS.2009.5173268

Filename

5173268