Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM/ESEM-hybrid-system

Author

Tiedemann, A.K. ; Heiderhoff, R. ; Balk, L.J. ; Phang, J.C.H.

Author_Institution

Dept. of Electron., Univ. of Wuppertal, Wuppertal, Germany

fYear

2009

fDate

26-30 April 2009

Firstpage

327

Lastpage

332

Abstract

A hybrid-system consisting of a scanning thermal microscope and an environmental scanning electron microscope is used to analyze directional thermal conductivity mechanisms. An electron beam stimulates locally variable hot spots, whereas a thermal probe is used as a locally resolving detector. The detected temperature oscillation strongly depends both on the local thermal conductivity and on the directivity of the heat transport within the investigated sample. This may allow analysis of linear structures like interfaces within materials.

Keywords

electron beam effects; environmental testing; scanning electron microscopy; semiconductor device testing; temperature distribution; thermal conductivity; SThM/ESEM-hybrid-system; electron beam effects; environmental scanning electron microscope; heat transport; scanning thermal microscope; temperature oscillation; thermal conductivity analysis; Conducting materials; Detectors; Electron beams; Failure analysis; Probes; Scanning electron microscopy; Spatial resolution; Temperature distribution; Thermal conductivity; Thermal engineering; SThM; hybrid-system; near-field; temperature distribution; thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 2009 IEEE International

Conference_Location

Montreal, QC

ISSN

1541-7026

Print_ISBN

978-1-4244-2888-5

Electronic_ISBN

1541-7026

Type

conf

DOI

10.1109/IRPS.2009.5173273

Filename

5173273