Title :
Electron beam induced temperature oscillation for qualitative thermal conductivity analysis by an SThM/ESEM-hybrid-system
Author :
Tiedemann, A.K. ; Heiderhoff, R. ; Balk, L.J. ; Phang, J.C.H.
Author_Institution :
Dept. of Electron., Univ. of Wuppertal, Wuppertal, Germany
Abstract :
A hybrid-system consisting of a scanning thermal microscope and an environmental scanning electron microscope is used to analyze directional thermal conductivity mechanisms. An electron beam stimulates locally variable hot spots, whereas a thermal probe is used as a locally resolving detector. The detected temperature oscillation strongly depends both on the local thermal conductivity and on the directivity of the heat transport within the investigated sample. This may allow analysis of linear structures like interfaces within materials.
Keywords :
electron beam effects; environmental testing; scanning electron microscopy; semiconductor device testing; temperature distribution; thermal conductivity; SThM/ESEM-hybrid-system; electron beam effects; environmental scanning electron microscope; heat transport; scanning thermal microscope; temperature oscillation; thermal conductivity analysis; Conducting materials; Detectors; Electron beams; Failure analysis; Probes; Scanning electron microscopy; Spatial resolution; Temperature distribution; Thermal conductivity; Thermal engineering; SThM; hybrid-system; near-field; temperature distribution; thermal conductivity;
Conference_Titel :
Reliability Physics Symposium, 2009 IEEE International
Conference_Location :
Montreal, QC
Print_ISBN :
978-1-4244-2888-5
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2009.5173273
