Title :
Silicon micro-lens antennas for THz integrated arrays
Author :
Alonso, M. ; Llombart, N. ; Lee, C. ; Jung, C. ; Chattopadhyay, G. ; Jofre, L. ; Mehdi, I.
Author_Institution :
Univ. Politec. de Cataluna, Spain
Abstract :
In this paper, we describe the characterization of silicon micro-lenses fabricated by two different techniques, one using laser micromachining and the other developed using photolithographical techniques. The micro-lens antenna patterns were measured from 530 to 600 GHz and the characteristics of the two lenses compared.
Keywords :
antenna arrays; laser beam machining; lens antennas; microlenses; photolithography; silicon; THz integrated array; frequency 530 GHz; frequency 600 GHz; laser micromachining; photolithographical technique; silicon microlens antenna; silicon microlenses; Antenna arrays; Antenna measurements; Imaging; Lenses; Measurement by laser beam; Radar imaging; Silicon;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104804
