DocumentCode
2671174
Title
Repeatability study of an electrothermally actuated micromirror
Author
Pal, Sagnik ; Xie, Huikai
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
fYear
2009
fDate
26-30 April 2009
Firstpage
549
Lastpage
556
Abstract
With their large scan range and low drive voltages, electrothermally-actuated micromirrors have great potential in optical biomedical imaging applications, but the repeatability and reliability of such micromirrors are not well understood. This paper reports the conditions for achieving repeatability of the embedded resistive heater and the mirror tilt angle of an electrothermal bimorph micromirror. The upper limit of the actuation voltage that does not degrade the embedded heater performance has been established.
Keywords
micro-optomechanical devices; microactuators; micromirrors; bimorph micromirror; electrothermal actuation; electrothermal micromirror; embedded resistive heater; repeatability; Actuators; Biomedical optical imaging; Degradation; Electronic packaging thermal management; Electrothermal effects; Guidelines; Micromechanical devices; Micromirrors; Mirrors; Voltage; MEMS; Microelectromechanical devices; bimorph; burn-in; electrothermal; micromirrors; reliability; repeatability;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2009 IEEE International
Conference_Location
Montreal, QC
ISSN
1541-7026
Print_ISBN
978-1-4244-2888-5
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2009.5173309
Filename
5173309
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