Title :
A Study Of Chlorine-containing Flamm Etching Discharges Using a Monte Carlo-Fluid Hybrid Model
Author :
Sommerer, T.J. ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Electrodes; Electrons; Etching; Helium; Monte Carlo methods; Plasma applications; Plasma density; Plasma properties; Production; Radio frequency;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.698005
