Title :
Ion Energy Distributions In Multicomponent
Author :
Hwang, Helen H. ; Sommerer, T.J. ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Argon; Electrodes; Electrons; Fabrication; Microelectronics; Plasma measurements; Radio frequency; Substrates; Surface discharges; Tellurium;
Conference_Titel :
Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
Conference_Location :
Tampa, FL, USA
Print_ISBN :
0-7803-0716-X
DOI :
10.1109/PLASMA.1992.698006
