• DocumentCode
    2671273
  • Title

    A Study Of Microscopic Plasma-particle Interactions In glow Discharges

  • Author

    Seung J.Choi ; Hwang, H.W. ; Kushner, Mark J.

  • Author_Institution
    University of Illinois
  • fYear
    1993
  • fDate
    1-3 June 1993
  • Firstpage
    180
  • Lastpage
    180
  • Keywords
    Electrons; Glow discharges; Microscopy; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma transport processes; Plasma x-ray sources; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science,1992. IEEE Conference Record - Abstracts., 1992 IEEE International Conference on
  • Conference_Location
    Tampa, FL, USA
  • Print_ISBN
    0-7803-0716-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.1992.698007
  • Filename
    698007
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2671273