Title :
Surface acoustic wave unidirectional transducers using anodic oxidation technology and low loss filters
Author :
Yamanouchi, K. ; Meguro, T. ; Matsumoto, K.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
A novel multilevel interconnection technology using anodic oxidation (MICTAO) has been proposed. This technology is applied to multiphase unidirectional transducers (UDTs) and to a novel configuration of single-phase UDTs. It is shown that multiphase UDTs can be easily fabricated using MICTAO. A high breakdown voltage between multilevel electrodes is obtained, i.e. 35 V for an Al2O3 dielectric layer of thickness 0.05 μm. Experimental results show a minimum insertion loss of 2.0 dB at 260 MHz
Keywords :
electrolytic machining; oxidation; surface acoustic wave devices; ultrasonic transducers; 0.05 mum; 2 dB; 260 MHz; Al2O3 dielectric layer; SAW unidirectional transducers; anodic oxidation technology; breakdown voltage; insertion loss; low loss filters; multilevel electrodes; multilevel interconnection technology; Acoustic transducers; Acoustic waves; Band pass filters; Dielectrics; Electrodes; Insertion loss; Oxidation; Reflection; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1989. Proceedings., IEEE 1989
Conference_Location :
Montreal, Que.
DOI :
10.1109/ULTSYM.1989.66962
