DocumentCode
2671813
Title
Highly precise parameter extraction of thin multi-layers in THz transmission and reflection geometry
Author
Brahm, A. ; Weigel, A. ; Riehemann, S. ; Notni, G. ; Tünnermann, A.
fYear
2011
fDate
2-7 Oct. 2011
Firstpage
1
Lastpage
2
Abstract
We present an algorithm operating in THz time-domain that enables us to determine unknown optical parameters of multi-layer systems. We investigated the algorithm with different multi-layer samples measured in THz transmission and reflection.
Keywords
optical multilayers; pulse measurement; terahertz spectroscopy; THz reflection geometry; THz time-domain spectroscopy; THz transmission geometry; optical parameter; pulse measurement; thin multilayer parameter extraction; Reflection; Refractive index; Resists; Silicon; Thickness measurement; Time domain analysis; Transfer functions;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location
Houston, TX
ISSN
2162-2027
Print_ISBN
978-1-4577-0510-6
Electronic_ISBN
2162-2027
Type
conf
DOI
10.1109/irmmw-THz.2011.6104869
Filename
6104869
Link To Document