DocumentCode
2672134
Title
Effects of photoinduced carrier injection on timedependent dielectric breakdown
Author
Atkin, J.M. ; Laibowitz, R.B. ; Heinz, T.F. ; Lloyd, J.R. ; Shaw, T.M. ; Cartier, E.
Author_Institution
Depts. of Phys. & Electr. Eng., Columbia Univ., New York, NY, USA
fYear
2009
fDate
26-30 April 2009
Firstpage
851
Lastpage
854
Abstract
Time-dependent dielectric breakdown experiments were performed under broadband UV illumination in order to investigate the effects of increased electron concentration on time to breakdown. Preliminary results show that breakdown can be achieved at shorter time scales and lower fields than in standard reliability tests.
Keywords
electric breakdown; reliability; ultraviolet radiation effects; broadband UV illumination; photoinduced carrier injection; reliability; time-dependent dielectric breakdown; Dielectric breakdown; Dielectric materials; Electric breakdown; Electrodes; Electrons; Life estimation; Materials reliability; Metal-insulator structures; Physics; Testing; breakdown; low-k; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2009 IEEE International
Conference_Location
Montreal, QC
ISSN
1541-7026
Print_ISBN
978-1-4244-2888-5
Electronic_ISBN
1541-7026
Type
conf
DOI
10.1109/IRPS.2009.5173365
Filename
5173365
Link To Document