Title :
Simulation and fabrication of large area uncooled microbolometers for terahertz wave detection
Author :
Oulachgar, H. ; Bolduc, M. ; Tremblay, M. ; Ilias, S. ; Provencal, F. ; Marchese, L. ; Alain, C. ; Topart, P. ; Jerominek, H. ; Bergeron, A.
Author_Institution :
Inst. Nat. d´´Opt. (INO), QC, Canada
Abstract :
Large area microbolometer detectors are very attractive for applications where high sensitivity is required. This is particularly important for long wavelength spectroscopy in the far-infrared and sub-millimeter region. This paper presents current progress in the development of large area uncooled microbolometer FPAs at INO.
Keywords :
bolometers; focal planes; infrared spectroscopy; microfabrication; sensitivity; submillimetre wave spectroscopy; terahertz wave detectors; FPA; far-infrared spectroscopy; focal plane arrays; large area uncooled microbolometer fabrication; sensitivity; submillimeter spectroscopy; terahertz wave detection; Detectors; Fabrication; Frequency selective surfaces; Nonhomogeneous media; Sensitivity; Silicon; Stress;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6104932
