Influence of micro-Golay cell cavity diameter on millimeter-wave detection sensitivity

Author

Denison, Douglas R. ; Knotts, Michael E. ; Hayden, Harley T. ; Young, Seth L. ; Tsukruk, Vladimir V.

Author_Institution

Signature Technol. Lab., Georgia Tech Res. Inst., Atlanta, GA, USA

fYear

2011

fDate

2-7 Oct. 2011

Firstpage

1

Lastpage

2

Abstract

We have experimentally demonstrated millimeter-wave detection using a micro-Golay cell based on a polymer nanocomposite membrane. To form Golay cells, the membrane was placed over an array of cavities ranging in diameter from 80 μm to 800 μm fabricated in a low-resistivity Si substrate by reactive ion etching. Measurements show an NEP of better than 300 nW/√Hz at 100 GHz and a linear scaling of sensitivity with cavity diameter.

Keywords

filled polymers; microwave photonics; millimetre wave detectors; nanocomposites; photodetectors; sensitivity analysis; Si; broadband photothermal detectors; frequency 100 GHz; microGolay cell cavity diameter; millimeter-wave detection sensitivity; polymer nanocomposite membrane; reactive ion etching; size 80 mum to 800 mum; Arrays; Cavity resonators; Detectors; Measurement by laser beam; Sensitivity; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on

Conference_Location

Houston, TX

ISSN

2162-2027

Print_ISBN

978-1-4577-0510-6

Electronic_ISBN

2162-2027

Type

conf

DOI

10.1109/irmmw-THz.2011.6104982

Filename

6104982