• DocumentCode
    2674741
  • Title

    IC critical volume calculation through ray-casting of CSG trees

  • Author

    Moran, Mike ; Allan, Gerard A.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Edinburgh Univ., UK
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    12
  • Lastpage
    20
  • Abstract
    This paper describes a method of finding the critical volume of integrated circuit (IC) layers. The aim of the technique is to calculate metrics of an IC that can be used to estimate the chip yield. The layout itself and the defects that arise in production are considered to be three-dimensional, as opposed to two-dimensional, objects
  • Keywords
    computational geometry; integrated circuit layout; integrated circuit yield; trees (mathematics); 3D objects; CSG trees; IC critical volume calculation; IC metrics calculation; chip yield estimation; constructive solid geometry trees; defects; integrated circuit layers; ray-casting; three-dimensional objects; Application specific integrated circuits; Costs; Geometry; Integrated circuit layout; Integrated circuit yield; Production; Shape; Solids; Three-dimensional integrated circuits; Yield estimation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Defect and Fault Tolerance in VLSI Systems, 2000. Proceedings. IEEE International Symposium on
  • Conference_Location
    Yamanashi
  • ISSN
    1550-5774
  • Print_ISBN
    0-7695-0719-0
  • Type

    conf

  • DOI
    10.1109/DFTVS.2000.886969
  • Filename
    886969