Title :
Section I: Fundamental problems of physics and technology of micro- and nanostructuires [breaker page]
Abstract :
Start of "Section I: Fundamental problems of physics and technology of micro- and nanostructuires" of the proceedings.
Conference_Titel :
Micro/Nanotechnologies and Electron Devices, 2009. EDM 2009. International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-4571-4
DOI :
10.1109/EDM.2009.5173911
