Title :
3D UV-LIGA microfabricated circuits for a wideband 50W G-band serpentine waveguide amplifier
Author :
Joye, Colin D. ; Calame, Jeffrey P. ; Abe, David K. ; Nguyen, Khanh T. ; Wright, Edward L. ; Pershing, Dean E. ; Garven, Morag ; Levush, Baruch
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
A wideband 220 GHz vacuum electronic amplifier is under development utilizing a novel method to fabricate 3D structures comprised of polymer monofilaments to form the beam tunnels and SU-8 to form the electromagnetic circuits. The complete structures are simultaneously formed in one UV-LIGA step. The method shows promise for THz VE microfabrication.
Keywords :
LIGA; millimetre wave amplifiers; polymers; wideband amplifiers; 3D UV-LIGA microfabricated circuits; G-band waveguide amplifier; SU-8; beam tunnels; electromagnetic circuits; frequency 220 GHz; polymer monofilaments; power 50 W; serpentine waveguide amplifier; wideband vacuum electronic amplifier; wideband waveguide amplifier; Annealing; Copper; Indexes; Polymers; Resistance; Three dimensional displays;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6105071
