Title :
Active imaging with THz fully-customized uncooled amorphous-silicon microbolometer focal plane arrays
Author :
Simoens, F. ; Lalanne-Dera, J. ; Meilhan, J. ; Pocas, S. ; Duy Thong Nguyen ; Ouvrier-Buffet, J.-L. ; Cathabard, Olivier ; Gellie, Pierre ; Barbieri, Stefano
Author_Institution :
CEA Leti-MINATEC, Grenoble, France
Abstract :
THz-customized uncooled 320×240 pixel arrays are being developed at CEA-LETI where antenna-coupled bolometer pixels are combined with a matched resonant cavity. We report first sensitivity measurements and video rate imaging essays.
Keywords :
amorphous semiconductors; antennas; bolometers; focal planes; terahertz wave imaging; CEA-LETI; Si; active imaging; antenna coupled bolometer pixels; matched resonant cavity; sensitivity measurements; terahertz imaging; uncooled amorphous silicon microbolometer focal plane arrays; video rate imaging; Absorption; Bolometers; CMOS integrated circuits; Imaging; Quantum cascade lasers; Real time systems; Reflection;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on
Conference_Location :
Houston, TX
Print_ISBN :
978-1-4577-0510-6
Electronic_ISBN :
2162-2027
DOI :
10.1109/irmmw-THz.2011.6105158
