Title :
Scanning infrared microscope
Author :
Karnaushenko, Dmitriy D. ; Polovinkin, Vladimir G.
Author_Institution :
Inst. of the Semicond. Phys., SB RAS, Novosibirsk, Russia
Abstract :
In this paper described scanning infrared microscope (SIRM) based on F408 infrared (IR) line spectrometer designed and developed in the ISP SB RAS. An automatically scanning system has been designed and implemented. Optical magnification and spatial resolution for given optical system has been determined. Advantages and disadvantages of SIRM in compare with F401 InAs matrix infrared microscope are also shown.
Keywords :
infrared spectroscopy; optical microscopy; F408 infrared line spectrometer; ISP; RAS; SIRM; infrared microscopy; optical magnification; optical system; scanning infrared microscopy; Automatic control; Biomedical optical imaging; Control systems; Infrared detectors; Infrared spectra; Microcontrollers; Microscopy; Optical sensors; Spatial resolution; Spectroscopy; Infrared; SIRM; microscope;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices, 2009. EDM 2009. International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-4571-4
DOI :
10.1109/EDM.2009.5174001
