Title :
CNT bundles growth on microhotplates for direct measurement of their thermal properties
Author :
Silvestri, C. ; Morana, B. ; Fiorentino, G. ; Vollebregt, Sten ; Pandraud, G. ; Santagata, F. ; Guo Qi Zhang ; Sarro, P.M.
Author_Institution :
ECTM-DIMES, Delft Univ. of Technol., Delft, Netherlands
Abstract :
Vertically aligned Carbon Nanotubes (CNT) arrays were successfully grown on top of a freestanding microhotplate, to investigate the thermal dissipation properties of CNT bundles and their applicability as heat exchanger. Two CNT configurations are employed: a group of six bundles, each with a diameter of 20 μm, and a single CNT bundle with a diameter of 200 μm. In both configurations the bundles are 70 μm high. The microhotplate consists of a platinum thin film microheater integrated on a freestanding silicon nitride membrane. The microhotplate is used as heat source and as temperature sensor. Results show that at 300 °C, 20% and 31% of power can be saved with the circular six and single bundle configurations, respectively.
Keywords :
carbon nanotubes; heat exchangers; membranes; metallic thin films; platinum; temperature measurement; temperature sensors; C; CNT bundles growth; Pt; SiN; direct measurement; heat exchanger; heat source; microheater; microhotplates; platinum thin film; silicon nitride membrane; size 20 mum; size 200 mum; temperature 300 degC; temperature sensor; thermal dissipation properties; thermal properties; vertically aligned carbon nanotubes arrays; Heating; Performance evaluation; Resistance; Silicon; Spirals; Temperature measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/MEMSYS.2014.6765570
